15μin. Ra max, 10μin Ra average surface finish (10μin. Ra max, 7μin. Ra max. 5μin. Ra max optional)
Minimized internal volume for short purge times
All materials used meet ASTM A479 / A484 / A276 standards
Internal connectors for pressure gauges
Flow capacity: to 15 slpm (standard), to 30 slpm (optional)
100% helium-leak-tested
ParameterParameter
Inlet pressure P1
Vacuum to 150 psig
Outlet pressure P2
10/30/60/100 psig
Surface finish
15μin. Ra max, 10μin Ra average surface finish (10μin. Ra max, 7μin. Ra max. 5μin. Ra max optional)
Inlets and Outlets
1/4” VFS fitting and tube weld
Temperature range
-40oF to +160oF (-40oC to +71oC)
External Leakage Allowance
<1x10-9 mbar I/s He
Internal Leakage Allowance
<1x10-8 mbar I/s He
Flow capacity
Cv=0.06 (Cv=0.1 optional)
Supply pressure effect
0.2 psig rise in delivery pressure per 20 psig source pressure drop @Cv=0.06；0.4 psig rise in delivery pressure per 20 psig source pressure drop @Cv=0.1
