Diaphragm Valve

UHP

UHP

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VDV38UB manual actuator - Diaphragm Valve

Diaphragm Valve

Diaphragm Valve

Product FeaturesProduct Features

Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and particle free performance
Valve open and closed position is easily visible at a glance
Excellent gas displacement characteristics
EP treatment is standard for all wetted surfaces
Standard seat material is PCTFE, Polyimide is option

ParameterParameter

Operating Pressure
3000 psig (206 bar) / 1300 psig (90 bar)
Surface finish
-40oF ~ 150oF (-40oC ~ 65oC)
Max. Working Temp.
10μin. Ra
Internal Leakage Allowance
<1x10-9 mbar I/s He
External Leakage Allowance
<1x10-9 mbar I/s He
Flow capacity
手动 Cv=1.0 气动 Cv=1.0 (90bar) / Cv=0.7 (206 bar)

Material QualityMaterial Quality

Body
316L / 316L secondary remelt
Diaphragm
Elgiloy®
Seat packing
PCTFE