VGR Series

GDS

GDS

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VGR Series

VGR Series

Product FeaturesProduct Features

Continuous and uninterrupted safe supply of electronic-grade bulk gases.
Optional venting and purging functions, with safety pressure relief.
Class 100 cleanroom welded assembly.
Optional PLC control with communication interface, which can be accessed by the intelligent monitoring platform system.
High pressure / Low pressure alarm with audible and visual signals, capable of emergency shutoff.
Touchscreen display for cylinder pressure and other data.
Complies with SEMI S2 standards.
Complies with international building fire safety codes.

ParameterParameter

Applicable gases
inert gases （CF4、SF6、CHF3、Ar、He etc.）
Gas Supply Method
Gas cylinder
Power supply
110~240V AC
Configurations
Single-cylinder, dual-cylinder
Maximum working pressure
110% of proof test pressure
Helium leak detection rate
1x10-9 mbar l/s He

Material QualityMaterial Quality

Valves
SS 316L
piping components
SS 316L