Pressure Gauge

UHP

UHP

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VRU - Pressure Gauge

Pressure Gauge

Pressure Gauge

Product FeaturesProduct Features

UHP “clean” for semiconductor gas applications, in accordance with SEMI/SEMATECH
Purged with nitrogen
Protective cap over threaded connection
100% factory calibrated and helium leak tested to a maximum rate of 1x10-9 mbar I/s He

ParameterParameter

Scale
psig / bar dual scale
Dial size
2”
Accuracy
Grade A per ASME B40.1
Ambient temperature
–40°F to 140°F (–40°C to 60°C)

Material QualityMaterial Quality

End connection
316L VAR,electropolished
Bourdon tube
316L SS
Case
304 SS
Window
polycarbonate
Dial & Pointer
aluminum