Atomic Layer Deposition Valves

UHP

UHP

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VALD - Atomic Layer Deposition Valves

Atomic Layer Deposition Valves

Atomic Layer Deposition Valves

Product FeaturesProduct Features

Ultrahigh cycle life with high-speed actuation
Normally open and normally closed pneumatic actuation
Electronic or optical actuator position-sensing option
Suitable for ultrahigh-purity applications
Modular surface-mount, tube butt weld, and VFS end connections
Opening and closing time of less than 5ms
Fully swept flow path facilities
Thermal isolation coupling optional

ParameterParameter

Max. Working Pressure
150 psig (10bar)
Nominal Diameter
Ф4.1
Working Temp.
-9oF ~ 399oF (-23oC ~ 200oC)，Body Max. Temp 200oC
Flow capacity
Cv=0.27

Material QualityMaterial Quality

Body
316L / 316L secondary remelt
Diaphragm
Elgiloy®
Seat Valve
High purtty PFA