VIGOUR | Electronic Specialty Gas Control System – The Lifeblood of Chip Manufacturing

Electronic gases are widely used in electronic product manufacturing processes, such as ion implantation, etching, vapor deposition, and doping. They are referred to as the "food" and "source" for materials like integrated circuits, LCD panels, LEDs, and Solar Energys. The performance of electronic semiconductor devices is closely related to the quality of electronic gases.

In recent years, China has experienced rapid development in emerging semiconductor application fields, including consumer electronics, automotive electronics, and industrial control. Supported by various favorable factors, it has become a certainty that China will undertake the third wave of semiconductor industry transfer. Relevant data shows that in the next three years, China will build 26 wafer fabs, accounting for 42% of the global total, leading to significant demand for semiconductor-related equipment. Among them, high-purity process systems are essential for doping, photolithography, etching, and CVD film deposition processes, accounting for about 3% of the total capital expenditure on integrated circuits. By 2019, the global high-purity process system market is expected to reach $3.38 billion, with the Chinese market estimated at $866 million and the semiconductor-grade valve market at about $433 million.

Definition of High-Purity Gas Transport Valves

The high-purity industry requires ultra-pure specialty gases, such as silane, chlorine, ammonia, nitrous oxide, phosphine, borane, tetrafluoromethane, trifluoromethane, helium, argon, and sulfur hexafluoride. Due to the industry's high demands for gas purity and flow control precision, and the fact that some gases are flammable, explosive, or highly corrosive and toxic, along with characteristics like high pressure, low temperature, and oxygen displacement, the storage, transport, and use of these high-purity gases require equipment that offers excellent cleanliness, superior sealing performance, the ability to measure and precisely control gas flow, and controllable pressure regulation. The VIGOUR fluid control system product VSR-100UB series pressure regulator uses high-quality Hastelloy® diaphragms and 316L bodies, with overall flow channels polished to a Ra of 10 μin through electro-polishing, meeting the stringent cleanliness and sealing requirements of the electronic specialty gas industry.

Components of the High-Purity Gas Transport System

High-purity gas transport valves are components of the high-purity gas system and belong to the gas supply system field. This includes gas supply devices connected to gas transport pipelines, where control valves, pressure regulators, and pressure gauges are set up along the pipelines. Several branch pipelines are also installed, each equipped with gas valves and terminal pressure gauges, with the branch pipelines connected to user terminals, enabling centralized gas supply to various laboratories, projects, and equipment.

VIGOUR is committed to providing high-quality and stable gas valves for the semiconductor industry, optoelectronic and Solar Energy industries, and the biopharmaceutical industry.